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Image
is Too Noisy?
1
Spot size is too small?
2
GUN Emission current is too low?
3
Variable aperture is too small?
4
Specimen position is not ideal - too far from the detector or the
desired surface is tilted away from the detector?
Tilt towards the detector?
5
High voltage is too low?
Resolution
is Poor?
1
Spot size too large?
2
Working distance too long?
3
Final Aperture too large?
4
Emission current too low or alignment poor?
5
High voltage too low?
6
Image does not contain high resolution information?
7
Too much backscatter in the image (kV too high or specimen tilted
towards the detector)?
Presentation of the Image is Poor?
1
Spot size incorrect, too small or too large?
2
Would tilt help present the information?
3
Have you the ideal WD?
4
Have you the correct kV for the job?
5
Have you the correct aperture (small) to obtain a good depth of
field, do you need to move the specimen further away from the final lens?
Are
you seeing a mixed SE/BSE image when you need a more pure BSE or SE
image? Lower the kV for the
latter raise the kV for the former.
Photographic Procedures
Unlike
conventional photography where the camera is adjusted to match the light
available, in the SEM the image is adjusted to suit a fixed camera
setting. This is achieved by
displaying the Wave Form and adjusting the signal and image intensity to
obtain a specific trace position on the screen with a specific amount of
AC in the trace. If the
camera has been correctly adjusted, using the f stop and base brightness
and contrast levels, the trace which produces a good quality image
should be about 2 cms high (AC) and placed in the centre of the CRT.
At your working magnification, tune the spot size
and signal control, until the image quality is satisfactory.
i) Low
magnification - use spot size and Contrast to obtain a TV quality image.
ii) Higher
magnification - adjust for a higher level of NOISE
1.
Move
to double your working magnification, and correct the focus and
astigmatism. Remember to use
the stigmators as fine focus controls, the procedure - focus - stigmate
X - stigmate Y - repeat, is ideal. Do
not try to look at the whole of the image, evaluate a very small area,
looking for maximum contrast as an indication of focus.
Doubling the magnification ensures that focus and astigmatism
corrections are sufficient for the working level, allowing a margin for
error.
2.
If
the image is not good enough, checked by using a slow scan at double the
working mag, use a smaller spot size (image dims or becomes more noisy)
and repeat the focus and astigmatism settings.
3.
Re
check the image quality at double the photo mag and at a slowish scan if
ok move on if not go back to 3.
4.
Drop
to the photo mag and set the brightness and contrast with a line scan,
wave form (WFM) or LSP.
5.
Set
up the WFM for a signal level that is suitable for the film speed being
used. A starting point would
be a 1.5cm high trace on the centre of the CRT.
If the CRT is marked set the contrast and brightness to fall
between the marks.
6.
Too
much contrast - lower the height of the trace peak to peak, and centre
it between the marks.
7.
Too
little contrast - increase the height peak to peak and centre between
the marks.
8.
Too
dim - raise the level with the brightness but keep the contrast the
same. Reverse the procedure
if the image is too bright.
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